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This edition was approved for publication by the global Audits and Reviews Subcommittee on February 1
SEMI E87-0921 (technical revision)
org in July 2009
SEMI E133-1107 (technical revision)
E05421 - SEMI E54.21 - Specification for Sensor Actuator Network for Motionnet Communication StdPbc-0419 This edition was approved forThis Document defines a communication specification based on the MOTIONNET protocol to enable communications between intelligent devices on a Sensor Actuator Network (SAN) that operate according to SEMI E54 device models on semiconductor manufacturing equipment. This Document gives interoperability with SEMI E54 common specific device model based Sensor Actuator devices. This Document specifies how Sensor Actuator Controller devices interoperate on